Finite element simulations combined with statistical analysis of variance: Exploring the potential of piezoelectric MEMS microphones

G. Schrag, T. Reutter, G. Wachutka

Publikation: Beitrag in Buch/Bericht/KonferenzbandKonferenzbeitragBegutachtung

3 Zitate (Scopus)

Abstract

Finite Element Analysis (FEA) has successfully been combined with the statistical analysis of variance (ANOVA) method to explore the potential of different piezoelectric microphone designs. The impact of the relevant design parameters on the overall microphone performance (sensitivity and frequency response) has been investigated, leading to an optimized design with a sensitivity of 1.64 mV/Pa (without amplification). This is much higher than reported for any other piezoelectric microphone variants in literature. Furthermore, the novel membrane design has been optimized with respect to robustness against thermally induced intrinsic stress variations, which is crucial in all layered membrane structures. The underlying FEA models have been calibrated on the basis of measurements on dedicated test structures.

OriginalspracheEnglisch
Titel2013 Transducers and Eurosensors XXVII
UntertitelThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Seiten1452-1455
Seitenumfang4
DOIs
PublikationsstatusVeröffentlicht - 2013
Veranstaltung2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spanien
Dauer: 16 Juni 201320 Juni 2013

Publikationsreihe

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Konferenz

Konferenz2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Land/GebietSpanien
OrtBarcelona
Zeitraum16/06/1320/06/13

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