Broadband RF-MEMS based SPDT

Sergio DiNardo; Paola Farinelli; Flavio Giacomozzi; Giovanni Mannocchi; Romolo Marcelli; Benno Margesin; Paolo Mezzanotte; Viviana Mulloni; Peter Russer; Roberto Sorrentino; Francesco Vitulli; Larissa Vietzorreck

doi:10.1109/EUMC.2006.281475

Broadband RF-MEMS based SPDT

Sergio DiNardo
, Paola Farinelli
, Flavio Giacomozzi
, Giovanni Mannocchi
, Romolo Marcelli
, Benno Margesin
, Paolo Mezzanotte
, Viviana Mulloni
, Peter Russer
, Roberto Sorrentino
, Francesco Vitulli
, Larissa Vietzorreck

Technische Universität München

Alcatel Alenia Space Italia S.p.A.
Università di Perugia
IMM-CNR
FBK-irst
Technische Universität München

Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › Begutachtung

28 Zitate (Scopus)

Abstract

A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capacitive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion loss better than -0.6 dB, return loss smaller than -20dB, and isolation better than -40 dB in nearly the whole band. A switching voltage around 50 V is needed. The switch is used as a building block for more complex switching networks. The fabrication process is described and the measured RF-performances are reported and discussed. A failure analysis exhibits a lifetime up to 10⁹ actuations.

Originalsprache	Englisch
Titel	Proceedings of the 36th European Microwave Conference, EuMC 2006
Herausgeber (Verlag)	IEEE Computer Society
Seiten	1727-1730
Seitenumfang	4
ISBN (Print)	2960055160, 9782960055160
DOIs	https://doi.org/10.1109/EUMC.2006.281475
Publikationsstatus	Veröffentlicht - 2006
Veranstaltung	36th European Microwave Conference, EuMC 2006 - Manchester, Großbritannien/Vereinigtes Königreich Dauer: 10 Sept. 2006 → 12 Sept. 2006

Publikationsreihe

Name	Proceedings of the 36th European Microwave Conference, EuMC 2006

Konferenz

Konferenz	36th European Microwave Conference, EuMC 2006
Land/Gebiet	Großbritannien/Vereinigtes Königreich
Ort	Manchester
Zeitraum	10/09/06 → 12/09/06

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SDG 9 – Industrie, Innovation und Infrastruktur

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10.1109/EUMC.2006.281475

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DiNardo, S., Farinelli, P., Giacomozzi, F., Mannocchi, G., Marcelli, R., Margesin, B., Mezzanotte, P., Mulloni, V., Russer, P., Sorrentino, R., Vitulli, F., & Vietzorreck, L. (2006). Broadband RF-MEMS based SPDT. in Proceedings of the 36th European Microwave Conference, EuMC 2006 (S. 1727-1730). Artikel 4058184 (Proceedings of the 36th European Microwave Conference, EuMC 2006). IEEE Computer Society. https://doi.org/10.1109/EUMC.2006.281475

@inproceedings{f4beca72d3cd454f9e05fb1e12d4485f,

title = "Broadband RF-MEMS based SPDT",

abstract = "A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capacitive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion loss better than -0.6 dB, return loss smaller than -20dB, and isolation better than -40 dB in nearly the whole band. A switching voltage around 50 V is needed. The switch is used as a building block for more complex switching networks. The fabrication process is described and the measured RF-performances are reported and discussed. A failure analysis exhibits a lifetime up to 109 actuations.",

keywords = "Coplanar waveguides, Micro-electromechanical devices, Micromachining, Passive circuits, Switches",

author = "Sergio DiNardo and Paola Farinelli and Flavio Giacomozzi and Giovanni Mannocchi and Romolo Marcelli and Benno Margesin and Paolo Mezzanotte and Viviana Mulloni and Peter Russer and Roberto Sorrentino and Francesco Vitulli and Larissa Vietzorreck",

year = "2006",

doi = "10.1109/EUMC.2006.281475",

language = "English",

isbn = "2960055160",

series = "Proceedings of the 36th European Microwave Conference, EuMC 2006",

publisher = "IEEE Computer Society",

pages = "1727--1730",

booktitle = "Proceedings of the 36th European Microwave Conference, EuMC 2006",

note = "36th European Microwave Conference, EuMC 2006 ; Conference date: 10-09-2006 Through 12-09-2006",

}

DiNardo, S, Farinelli, P, Giacomozzi, F, Mannocchi, G, Marcelli, R, Margesin, B, Mezzanotte, P, Mulloni, V, Russer, P, Sorrentino, R, Vitulli, F & Vietzorreck, L 2006, Broadband RF-MEMS based SPDT. in Proceedings of the 36th European Microwave Conference, EuMC 2006., 4058184, Proceedings of the 36th European Microwave Conference, EuMC 2006, IEEE Computer Society, S. 1727-1730, 36th European Microwave Conference, EuMC 2006, Manchester, Großbritannien/Vereinigtes Königreich, 10/09/06. https://doi.org/10.1109/EUMC.2006.281475

TY - GEN

T1 - Broadband RF-MEMS based SPDT

AU - DiNardo, Sergio

AU - Farinelli, Paola

AU - Giacomozzi, Flavio

AU - Mannocchi, Giovanni

AU - Marcelli, Romolo

AU - Margesin, Benno

AU - Mezzanotte, Paolo

AU - Mulloni, Viviana

AU - Russer, Peter

AU - Sorrentino, Roberto

AU - Vitulli, Francesco

AU - Vietzorreck, Larissa

PY - 2006

Y1 - 2006

N2 - A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capacitive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion loss better than -0.6 dB, return loss smaller than -20dB, and isolation better than -40 dB in nearly the whole band. A switching voltage around 50 V is needed. The switch is used as a building block for more complex switching networks. The fabrication process is described and the measured RF-performances are reported and discussed. A failure analysis exhibits a lifetime up to 109 actuations.

AB - A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capacitive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion loss better than -0.6 dB, return loss smaller than -20dB, and isolation better than -40 dB in nearly the whole band. A switching voltage around 50 V is needed. The switch is used as a building block for more complex switching networks. The fabrication process is described and the measured RF-performances are reported and discussed. A failure analysis exhibits a lifetime up to 109 actuations.

KW - Coplanar waveguides

KW - Micro-electromechanical devices

KW - Micromachining

KW - Passive circuits

KW - Switches

UR - https://www.scopus.com/pages/publications/41649110326

U2 - 10.1109/EUMC.2006.281475

DO - 10.1109/EUMC.2006.281475

M3 - Conference contribution

AN - SCOPUS:41649110326

SN - 2960055160

SN - 9782960055160

T3 - Proceedings of the 36th European Microwave Conference, EuMC 2006

SP - 1727

EP - 1730

BT - Proceedings of the 36th European Microwave Conference, EuMC 2006

PB - IEEE Computer Society

T2 - 36th European Microwave Conference, EuMC 2006

Y2 - 10 September 2006 through 12 September 2006

ER -

Broadband RF-MEMS based SPDT

Abstract

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Konferenz

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