Broadband RF-MEMS based SPDT

Sergio DiNardo, Paola Farinelli, Flavio Giacomozzi, Giovanni Mannocchi, Romolo Marcelli, Benno Margesin, Paolo Mezzanotte, Viviana Mulloni, Peter Russer, Roberto Sorrentino, Francesco Vitulli, Larissa Vietzorreck

Publikation: Beitrag in Buch/Bericht/KonferenzbandKonferenzbeitragBegutachtung

28 Zitate (Scopus)


A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capacitive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion loss better than -0.6 dB, return loss smaller than -20dB, and isolation better than -40 dB in nearly the whole band. A switching voltage around 50 V is needed. The switch is used as a building block for more complex switching networks. The fabrication process is described and the measured RF-performances are reported and discussed. A failure analysis exhibits a lifetime up to 109 actuations.

TitelProceedings of the 36th European Microwave Conference, EuMC 2006
Herausgeber (Verlag)IEEE Computer Society
ISBN (Print)2960055160, 9782960055160
PublikationsstatusVeröffentlicht - 2006
Veranstaltung36th European Microwave Conference, EuMC 2006 - Manchester, Großbritannien/Vereinigtes Königreich
Dauer: 10 Sept. 200612 Sept. 2006


NameProceedings of the 36th European Microwave Conference, EuMC 2006


Konferenz36th European Microwave Conference, EuMC 2006
Land/GebietGroßbritannien/Vereinigtes Königreich


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