@inproceedings{f4beca72d3cd454f9e05fb1e12d4485f,
title = "Broadband RF-MEMS based SPDT",
abstract = "A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capacitive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion loss better than -0.6 dB, return loss smaller than -20dB, and isolation better than -40 dB in nearly the whole band. A switching voltage around 50 V is needed. The switch is used as a building block for more complex switching networks. The fabrication process is described and the measured RF-performances are reported and discussed. A failure analysis exhibits a lifetime up to 109 actuations.",
keywords = "Coplanar waveguides, Micro-electromechanical devices, Micromachining, Passive circuits, Switches",
author = "Sergio DiNardo and Paola Farinelli and Flavio Giacomozzi and Giovanni Mannocchi and Romolo Marcelli and Benno Margesin and Paolo Mezzanotte and Viviana Mulloni and Peter Russer and Roberto Sorrentino and Francesco Vitulli and Larissa Vietzorreck",
year = "2006",
doi = "10.1109/EUMC.2006.281475",
language = "English",
isbn = "2960055160",
series = "Proceedings of the 36th European Microwave Conference, EuMC 2006",
publisher = "IEEE Computer Society",
pages = "1727--1730",
booktitle = "Proceedings of the 36th European Microwave Conference, EuMC 2006",
note = "36th European Microwave Conference, EuMC 2006 ; Conference date: 10-09-2006 Through 12-09-2006",
}