TY - GEN
T1 - Analysis of micropump operation using HDL-A macromodels
AU - Voigt, Peter
AU - Wachutka, Gerhard
N1 - Publisher Copyright:
© 1996 Editions Frontieres.
PY - 1996
Y1 - 1996
N2 - We demonstrate that the operation of microfluidic components such as micropumps can be efficiently modelled by standard electrical circuit simulators, using the Analog Hardware Description Language (HDL-A) for the model description. To this end we developed compact models for all parts of the micropump, including electrostatically actuated membranes, membrane valves and tubes. With the resulting macromodel of the entire pump the static characteristics as well as the dynamic behavior was correctly reproduced. Thus, with our approach it is possible to include nonelectrical systems straightforwardly in conventional microelectronic design environments.
AB - We demonstrate that the operation of microfluidic components such as micropumps can be efficiently modelled by standard electrical circuit simulators, using the Analog Hardware Description Language (HDL-A) for the model description. To this end we developed compact models for all parts of the micropump, including electrostatically actuated membranes, membrane valves and tubes. With the resulting macromodel of the entire pump the static characteristics as well as the dynamic behavior was correctly reproduced. Thus, with our approach it is possible to include nonelectrical systems straightforwardly in conventional microelectronic design environments.
UR - http://www.scopus.com/inward/record.url?scp=0040328132&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0040328132
SN - 9782863321966
T3 - European Solid-State Device Research Conference
SP - 199
EP - 202
BT - ESSDERC 1996 - Proceedings of the 26th European Solid State Device Research Conference
A2 - Rudan, Massimo
A2 - Baccarani, Giorgio
PB - IEEE Computer Society
T2 - 26th European Solid State Device Research Conference, ESSDERC 1996
Y2 - 9 September 1996 through 11 September 1996
ER -