Adaptive inverse control of a galvanometer scanner considering the structural dynamic behavior

In industrial applications, scanner systems are utilized for several operations, but do not always meet the desired dynamics. Various controller-based approaches, which concentrate on simple trajectories or changes in operation points, have been presented within the last years; however, these are not sufficient for many production processes. In this paper, adaptive inverse control is utilized to enhance the scanner's dynamics. The influence of structural dynamics is compensated by taking the behavior of the galvanometers’ mirrors into account. The performance of the new approach is verified by experimental results, reducing the optical error by almost 95% compared to current scanner systems.