Abstract
A rotor is supported contactless and without any wear by using electromagnetic bearings. In addition, the dynamic behaviour of the rotor is optimized by controlling the bearing forces according to a specified control law. The control depends on the complete rotor state, which is obtained from limited measurement information through a minimal order observer. The electromagnetic actuators have been developed as self contained bearing elements. Due to their linear input/output characteristics they can be easily integrated into the multivariable control loop of the rotor-bearing-system. The theoretical results are corroborated by experiments. The rotor was developed for application in liquid-phase epitaxial growth of very thin semiconductor layers. For this purpose, a very smooth rotation is required in a reactor which is leak-proof even under ultrahigh-vacuum conditions. An active suspension was necessary in order to absolutely exclude contamination by lubricants or wear. (A)
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 181-184 |
| Seitenumfang | 4 |
| Fachzeitschrift | IN: PROC. 5TH WORLD CONGRESS ON THE THEORY OF MACHINES AND MECHANISMS, (MONTREAL, CANADA: JUL.8-13, 1979) |
| Jahrgang | 1 , New York, U.S.A., Am. Soc. Mech. Engrs., 1979 |
| Publikationsstatus | Veröffentlicht - 1979 |