A novel approach for the preparation of metal oxide/CNTs composites for sensing applications

G. Neri, A. Bonavita, G. Micali, G. Rizzo, M. G. Willinger, E. Rauwel, N. Pinna

Publikation: Beitrag in Buch/Bericht/KonferenzbandKonferenzbeitragBegutachtung

1 Zitat (Scopus)

Abstract

In this report we describe the preparation of metal oxide coated-carbon nanotubes (MeOx/CNTs) with a controlled thickness of the inorganic coating by a new atomic layer deposition (ALD) process based on non-aqueous sol-gel reactions. The as deposited films are amorphous and the coatings on the inside and outside the nanotube present a high conformality. The electrical and sensing properties of thin films of VOx-coated carbon nanotubes prepared by ALD have been investigated. The developed VOx/CNTs-based sensor devices show enhanced performance for NO2 monitoring compared to uncoated CNTs-based sensors.

OriginalspracheEnglisch
TitelSensors and Microsystems - AISEM 2009 Proceedings
Seiten63-66
Seitenumfang4
DOIs
PublikationsstatusVeröffentlicht - 2010
Extern publiziertJa
Veranstaltung14th Italian Conference on Sensors and Microsystems, AISEM 2009 - Pavia, Italien
Dauer: 24 Feb. 200926 Feb. 2009

Publikationsreihe

NameLecture Notes in Electrical Engineering
Band54 LNEE
ISSN (Print)1876-1100
ISSN (elektronisch)1876-1119

Konferenz

Konferenz14th Italian Conference on Sensors and Microsystems, AISEM 2009
Land/GebietItalien
OrtPavia
Zeitraum24/02/0926/02/09

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